DN63CF Quartz VP, AR Coated 248nm
$1,824.00 ex. VAT
Product description
DN63CF coated quartz viewing window, EUV grade, with single line coating 248nm with <0.25% loss / area
viewing diameter 68mm
Usable tempered diameter 50mm
Homogeneity Grade A, Inclusions Class 0
Flatness lambda/4 @632nm
Parallelism < 10 arc sec
polish 20/10 scratch / dig
Temp. range -100 … +200°C
Leak rate < 2x 10-10 mbar l/s He (without He diffusion through quartz)
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