DN63CF 316LN viewport, EUV Fused Silica
$2,900.00 ex. VAT
Product description
DN63CF non-magnetic viewing window, Fused Sililca (quartz) in EUV quality,
Material Corning HPFS 7980 Excimer Grade Fused Silica
degree of homogeneity A
inclusion class 0
parallelism < 10 arc seconds
flatness λ/4@632nm
Polish 20/10 Scratch-Dig
Transmission >99.5%@193nm (internal)
Magnetic permeability μ < 1.01
viewing diameter 68mm
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